DYNAMIC MODELING OF HIGH-DOSE OXYGEN PROFILES IN SIMOX SUBSTRATES

U BUSSMANN; PLF HEMMENT; RP WEBB; AK ROBINSON

doi:10.1016/0921-5107(92)90262-8

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DYNAMIC MODELING OF HIGH-DOSE OXYGEN PROFILES IN SIMOX SUBSTRATES

Journal article

Peer reviewed

DYNAMIC MODELING OF HIGH-DOSE OXYGEN PROFILES IN SIMOX SUBSTRATES

U BUSSMANN, PLF HEMMENT, RP WEBB and AK ROBINSON

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol.12(1-2), pp.73-76

20/01/1992

DOI: https://doi.org/10.1016/0921-5107(92)90262-8

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Condensed Matter

Materials Science

Physics

SILICON

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Title: DYNAMIC MODELING OF HIGH-DOSE OXYGEN PROFILES IN SIMOX SUBSTRATES
Creators: U BUSSMANN
PLF HEMMENT
RP WEBB
AK ROBINSON
Publication Details: MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol.12(1-2), pp.73-76
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Publication Date: 20/01/1992
Identifiers: 99513305502346; WOS:A1992HE15800015
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

DYNAMIC MODELING OF HIGH-DOSE OXYGEN PROFILES IN SIMOX SUBSTRATES

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