Composition of Ni-Ta-C thick films using simulated annealing analysis of elastic backscattering spectrometry data

C Jeynes; NP Barradas; JR Wilde; AL Greer

doi:10.1016/S0168-583X(99)00950-7

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Composition of Ni-Ta-C thick films using simulated annealing analysis of elastic backscattering spectrometry data

C Jeynes, NP Barradas, JR Wilde and AL Greer

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.161, pp.287-292

01/03/2000

DOI: https://doi.org/10.1016/S0168-583X(99)00950-7

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

RES

non-Rutherford

data analysis

simulated annealing

CROSS-SECTION

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Title: Composition of Ni-Ta-C thick films using simulated annealing analysis of elastic backscattering spectrometry data
Creators: C Jeynes
NP Barradas
JR Wilde
AL Greer
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.161, pp.287-292
Publisher: ELSEVIER SCIENCE BV
Publication Date: 01/03/2000
Identifiers: 99513260402346; WOS:000086204100051
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Composition of Ni-Ta-C thick films using simulated annealing analysis of elastic backscattering spectrometry data

Abstract

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