- Title
- Vacancy-related defects in ion implanted and electron irradiated silicon
- Creators
- AR PeakerJH Evans-FreemanPYY KanID HawkinsJ TerryC JeynesL Rubaldo
- Contributors
- ELSEVIER SCIENCE SA (Publisher)
- Publication Details
- MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol.71, pp.143-147
- Conference
- Symposium F: Process Induced Defects in Semiconductors at the 1999 Spring Meeting of the European-Materials-Research-Society (STRASBOURG, FRANCE, 01/06/1999–04/06/1999)
- Publication Date
- 14/02/2000
- Identifiers
- 99513233902346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Vacancy-related defects in ion implanted and electron irradiated silicon
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol.71, pp.143-147
Symposium F: Process Induced Defects in Semiconductors at the 1999 Spring Meeting of the European-Materials-Research-Society (STRASBOURG, FRANCE, 01/06/1999–04/06/1999)
14/02/2000