A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

NP Barradas; N Added; WM Arnoldbik; I Bogdanovic-Radovic; W Bohne; S Cardoso; C Danner; N Dytlewski; PP Freitas; M Jaksic; C Jeynes; C Krug; WN Lennard; S Lindner; C Linsmeier; Z Medunic; P Pelicon; RP Pezzi; C Radtke; J Rohrich; T Sajavaara; TDM Salgado; FC Stedile; MH Tabacniks; I Vickridge

doi:10.1016/j.nimb.2004.08.021

Back

A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

Journal article

Peer reviewed

A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

NP Barradas, N Added, WM Arnoldbik, I Bogdanovic-Radovic, W Bohne, S Cardoso, C Danner, N Dytlewski, PP Freitas, M Jaksic, …

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.227(3), pp.397-419

01/01/2005

DOI: https://doi.org/10.1016/j.nimb.2004.08.021

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

round robin

thin films

ion beam analysis

oxynitrides

tunnel junction barrier

DEPENDENT TUNNEL-JUNCTIONS

ALUMINUM-OXYNITRIDE FILMS

ENERGY ION-SCATTERING

QUANTITATIVE-ANALYSIS

RBS

SI

SILICON

RESISTANCE

HYDROGEN

CALIBRATION

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=000225817100018&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

1 File views/ downloads

28 Record Views

4 Times Cited - Web of Science

Details

Title: A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films
Creators: NP Barradas
N Added
WM Arnoldbik
I Bogdanovic-Radovic
W Bohne
S Cardoso
C Danner
N Dytlewski
PP Freitas
M Jaksic
C Jeynes
C Krug
WN Lennard
S Lindner
C Linsmeier
Z Medunic
P Pelicon
RP Pezzi
C Radtke
J Rohrich
T Sajavaara
TDM Salgado
FC Stedile
MH Tabacniks
I Vickridge
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.227(3), pp.397-419
Publisher: ELSEVIER SCIENCE BV
Date published: 01/01/2005
Date submitted: 24/10/2014
Identifiers: 99513202302346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

Abstract

Files and links (1)

Metrics

Details

Usage Policy