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Anti-site Defects are Found at Large Distances from Localised H and He Ion Implantations
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Anti-site Defects are Found at Large Distances from Localised H and He Ion Implantations

JW Steeds, N Peng and W Sullivan
SILICON CARBIDE AND RELATED MATERIALS 2008, Vol.615-61, pp.409-412
7th European Conference on Silicon Carbide and Related Materials (Barcelona, SPAIN, 07/09/2008 - 11/09/2008)
01/01/2009

Abstract

Science & Technology Technology Engineering Electrical & Electronic Materials Science Ceramics Materials Science Multidisciplinary Engineering Materials Science defects photoluminescence 4H SiC helium and proton implantation PHOTOLUMINESCENCE
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