Logo image
Open Research University homepage
Surrey researchers Sign in
Profiling As plasma doped Si/SiO₂ with molecular ions
Journal article   Peer reviewed

Profiling As plasma doped Si/SiO₂ with molecular ions

H. Trombini, I. Alencar, G. G. Marmitt, R. Fadanelli, P. L. Grande, M. Vos and J. G. England
Thin Solid Films
2019

Abstract

Plasma doping; Medium Energy Ion Scattering; Molecular ions; Coulomb explosion; Depth profiling
url
https://www.journals.elsevier.com/thin-solid-filmsView

Metrics

Details

Logo image

Usage Policy