ATOMIC-COLLISIONS IN SEMICONDUCTORS

R SMITH; RP WEBB

doi:10.1080/10420159408219801

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ATOMIC-COLLISIONS IN SEMICONDUCTORS

R SMITH and RP WEBB

RADIATION EFFECTS AND DEFECTS IN SOLIDS, Vol.130, pp.433-445

01/01/1994

DOI: https://doi.org/10.1080/10420159408219801

Abstract

Science & Technology

Technology

Physical Sciences

Nuclear Science & Technology

Physics

Fluids & Plasmas

Physics

Condensed Matter

Physics

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

CONDENSED MATTER

PHYSICS

FLUIDS & PLASMAS

SEMICONDUCTORS

MANY-BODY POTENTIALS

IMPLANTATION

DAMAGE

SPUTTERING

KEV PARTICLE BOMBARDMENT

MOLECULAR-DYNAMICS

COMPUTER-SIMULATION

ENERGY

SILICON

METALS

SURFACES

MODEL

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Title: ATOMIC-COLLISIONS IN SEMICONDUCTORS
Creators: R SMITH
RP WEBB
Publication Details: RADIATION EFFECTS AND DEFECTS IN SOLIDS, Vol.130, pp.433-445
Publisher: GORDON BREACH SCI PUBL LTD
Date published: 01/01/1994
Date submitted: 17/05/2017
Identifiers: 99512838102346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

ATOMIC-COLLISIONS IN SEMICONDUCTORS

Abstract

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