Investigation of ion beam mixing effects in Ta/Pd bilayers deposited on Si

N Bibic; M Milosavljevic; D Perusko; C Jeynes

doi:10.1016/S0040-6090(97)00528-2

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Investigation of ion beam mixing effects in Ta/Pd bilayers deposited on Si

Conference presentation

Peer reviewed

Investigation of ion beam mixing effects in Ta/Pd bilayers deposited on Si

N Bibic, M Milosavljevic, D Perusko and C Jeynes

THIN SOLID FILMS, Vol.317(1-2), pp.274-277

5th European Vacuum Conference (EVC 5) / 10th International Conference on Thin Films (ICTF 10) (UNIV SALAMANCA, SALAMANCA, SPAIN, 23/09/1996 - 27/09/1996)

01/04/1998

DOI: https://doi.org/10.1016/S0040-6090(97)00528-2

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

ion beam

Ta/Pd bilayers

vacuum

THIN-FILMS

SILICON

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Title: Investigation of ion beam mixing effects in Ta/Pd bilayers deposited on Si
Creators: N Bibic
M Milosavljevic
D Perusko
C Jeynes
Contributors: ELSEVIER SCIENCE SA (Publisher)
Publication Details: THIN SOLID FILMS, Vol.317(1-2), pp.274-277
Conference: 5th European Vacuum Conference (EVC 5) / 10th International Conference on Thin Films (ICTF 10) (UNIV SALAMANCA, SALAMANCA, SPAIN, 23/09/1996 - 27/09/1996)
Date published: 01/04/1998
Date submitted: 17/05/2017
Identifiers: 99512823302346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Investigation of ion beam mixing effects in Ta/Pd bilayers deposited on Si

Abstract

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