Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium

MA Razali; AJ Smith; C Jeynes; RM Gwilliam

doi:10.1063/1.4766522

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Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium

Conference presentation

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Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium

MA Razali, AJ Smith, C Jeynes and RM Gwilliam

ION IMPLANTATION TECHNOLOGY 2012, Vol.1496, pp.193-196

19th International Conference on Ion Implantation Technology (IIT) (Valladolid, SPAIN, 25/06/2012–29/06/2012)

01/01/2012

DOI: https://doi.org/10.1063/1.4766522

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Electrical & Electronic

Physics

Applied

Engineering

Physics

Phosphorus

Ion Implantation

Damage

Germanium

High and low temperature implantation

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Title: Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium
Creators: MA Razali
AJ Smith
C Jeynes
RM Gwilliam
Contributors: AMER INST PHYSICS (null)
Publication Details: ION IMPLANTATION TECHNOLOGY 2012, Vol.1496, pp.193-196
Conference: 19th International Conference on Ion Implantation Technology (IIT) (Valladolid, SPAIN, 25/06/2012–29/06/2012)
Publication Date: 01/01/2012
Identifiers: 99512757702346
Academic Unit: School of Computer Science and Electronic Engineering
Resource Type: Conference presentation

Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium

Abstract

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