MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

DN JAMIESON; GW GRIME; F WATT; DA WILLIAMS

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MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

DN JAMIESON, GW GRIME, F WATT and DA WILLIAMS

MICROSCOPY OF SEMICONDUCTING MATERIALS 1989, Vol.100, pp.87-92

CONF ON MICROSCOPY OF SEMICONDUCTING MATERIALS (OXFORD UNIV, OXFORD, ENGLAND, 10/04/1989 - 13/04/1989)

01/01/1989

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Microscopy

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

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Title: MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES
Creators: DN JAMIESON
GW GRIME
F WATT
DA WILLIAMS
Contributors: AG CULLIS
JL HUTCHINSON
IOP PUBLISHING LTD (Publisher)
Publication Details: MICROSCOPY OF SEMICONDUCTING MATERIALS 1989, Vol.100, pp.87-92
Conference: CONF ON MICROSCOPY OF SEMICONDUCTING MATERIALS (OXFORD UNIV, OXFORD, ENGLAND, 10/04/1989 - 13/04/1989)
Date published: 01/01/1989
Date submitted: 17/05/2017
Identifiers: 99512755702346
Academic Unit: University of Surrey
Resource Type: Conference presentation

MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

Abstract

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