Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

S Marson; RA Dorey; Q Zhang; RW Whatmore

doi:10.1080/10584580390259001

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Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

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Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

S Marson, RA Dorey, Q Zhang and RW Whatmore

INTEGRATED FERROELECTRICS, Vol.54, pp.585-593

15th International Symposium on Integrated Ferroelectrics (COLORADO SPRINGS, COLORADO, 09/03/2003 - 12/03/2003)

01/01/2003

DOI: https://doi.org/10.1080/10584580390259001

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Title: Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution
Creators: S Marson
RA Dorey
Q Zhang
RW Whatmore
Contributors: TAYLOR & FRANCIS LTD (Publisher)
Publication Details: INTEGRATED FERROELECTRICS, Vol.54, pp.585-593
Conference: 15th International Symposium on Integrated Ferroelectrics (COLORADO SPRINGS, COLORADO, 09/03/2003 - 12/03/2003)
Date published: 01/01/2003
Date submitted: 17/05/2017
Identifiers: 99512719402346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

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