MEV ION-BEAM LITHOGRAPHY OF PMMA

MBH BREESE; GW GRIME; F WATT; D WILLIAMS

doi:10.1016/0168-583X(93)95540-L

Back

Conference presentation

Peer reviewed

MEV ION-BEAM LITHOGRAPHY OF PMMA

MBH BREESE, GW GRIME, F WATT and D WILLIAMS

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.77(1-4), pp.169-174

3RD INTERNATIONAL CONF ON NUCLEAR MICROPROBE TECHNOLOGY AND APPLICATIONS (UPPSALA, SWEDEN, 08/06/1992 - 12/06/1992)

01/05/1993

DOI: https://doi.org/10.1016/0168-583X(93)95540-L

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

X-RAY-LITHOGRAPHY

EXPOSURE

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1993KZ78200028&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

24 Record Views

Details

Title: MEV ION-BEAM LITHOGRAPHY OF PMMA
Creators: MBH BREESE
GW GRIME
F WATT
D WILLIAMS
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.77(1-4), pp.169-174
Conference: 3RD INTERNATIONAL CONF ON NUCLEAR MICROPROBE TECHNOLOGY AND APPLICATIONS (UPPSALA, SWEDEN, 08/06/1992 - 12/06/1992)
Date published: 01/05/1993
Date submitted: 17/05/2017
Identifiers: 99512680102346
Academic Unit: University of Surrey
Resource Type: Conference presentation

MEV ION-BEAM LITHOGRAPHY OF PMMA

Abstract

Files and links (1)

Metrics

Details

Usage Policy