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Characterization of as implanted silicides by frequency noise level measurements
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Characterization of as implanted silicides by frequency noise level measurements

M Stojanovic, M Milosavljevic and C Jeynes
ADVANCED MATERIALS AND PROCESSES, Vol.282-2, pp.153-156
2nd Yugoslav Conference on Advanced Materials (YUGOMAT II) (HERCEG-NOVI, YUGOSLAVIA, 15/09/1997 - 19/09/1997)
01/01/1998

Abstract

Science & Technology Technology Physical Sciences Materials Science Ceramics Materials Science Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Coatings & Films Materials Science Composites Polymer Science Materials Science ion beam implantation surface silicide RBS noise level characterization CONTACTS SILICON
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