- Title
- 2D Monte Carlo simulation of proton implantation of superconducting YBa2Cu3O7-delta thin films through high aspect ratio Nb masks
- Creators
- NH PengI ChakarovC JeynesR WebbW BooijM BlamireM Kelly
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.164, pp.979-985
- Conference
- 18th International Conference on Atomic Collisions in Solids (ICACS-18) (ODENSE, DENMARK, 03/08/1999–08/08/1999)
- Publication Date
- 01/04/2000
- Identifiers
- 99512660402346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
2D Monte Carlo simulation of proton implantation of superconducting YBa2Cu3O7-delta thin films through high aspect ratio Nb masks
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.164, pp.979-985
18th International Conference on Atomic Collisions in Solids (ICACS-18) (ODENSE, DENMARK, 03/08/1999–08/08/1999)
01/04/2000