High depth resolution Rutherford backscattering analysis of Si-Si0.78Ge0.22/(0 0 1)Si superlattices

NP Barradas; C Jeynes; OA Mironov; PJ Phillips; EHC Parker

doi:10.1016/S0168-583X(97)00965-8

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High depth resolution Rutherford backscattering analysis of Si-Si0.78Ge0.22/(0 0 1)Si superlattices

NP Barradas, C Jeynes, OA Mironov, PJ Phillips and EHC Parker

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.139(1-4), pp.239-243

01/04/1998

DOI: https://doi.org/10.1016/S0168-583X(97)00965-8

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

high depth resolution

RBS

Si-SiGe

multilayers

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Title: High depth resolution Rutherford backscattering analysis of Si-Si0.78Ge0.22/(0 0 1)Si superlattices
Creators: NP Barradas
C Jeynes
OA Mironov
PJ Phillips
EHC Parker
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.139(1-4), pp.239-243
Publisher: ELSEVIER SCIENCE BV
Date published: 01/04/1998
Date submitted: 17/05/2017
Identifiers: 99512651002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

High depth resolution Rutherford backscattering analysis of Si-Si0.78Ge0.22/(0 0 1)Si superlattices

Abstract

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