- Title
- Measurement of Beam Potentials and Surface Voltages on Semiconductor Wafers Using an Ion Spectrometer
- Creators
- Jonathan EnglandN. BryanH. ItoD. ArmourJ. Van den BergI. FotheringhamP. Kindersley
- Contributors
- D. F. DowneyM. FarleyK.S. JonesG. Ryding
- Publication Details
- Ion Implantation Technology-92: Proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992
- Conference
- Ninth International Conference on Ion Implantation Technology (IIT 92) (Gainesvile, Florida, USA)
- Date published
- 31/05/1993
- Date submitted
- 16/06/2017
- Identifiers
- 99512581102346
- Copyright
- © North Holland 1993
- Academic Unit
- School of Computer Science and Electronic Engineering
- Resource Type
- Conference presentation
Conference presentation
Measurement of Beam Potentials and Surface Voltages on Semiconductor Wafers Using an Ion Spectrometer
Ion Implantation Technology-92: Proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992
Ninth International Conference on Ion Implantation Technology (IIT 92) (Gainesvile, Florida, USA)
31/05/1993
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