Patterned high frequency thick film MEMS transducer

FM Dauchy; RA Dorey

doi:10.1080/10584580601099108

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Patterned high frequency thick film MEMS transducer

Conference presentation

Peer reviewed

Patterned high frequency thick film MEMS transducer

FM Dauchy and RA Dorey

INTEGRATED FERROELECTRICS, Vol.90, pp.42-52

18th International Symposium on Integrated Ferroelectrics (Honolulu, HI, 23/04/2006 - 27/04/2006)

01/01/2007

DOI: https://doi.org/10.1080/10584580601099108

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Electrical & Electronic

Physics

Applied

Physics

Condensed Matter

Engineering

Physics

ENGINEERING

ELECTRICAL & ELECTRONIC

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

high frequency

piezoelectricity

MEMS

transducers

PZT

thick film

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Title: Patterned high frequency thick film MEMS transducer
Creators: FM Dauchy
RA Dorey
Contributors: TAYLOR & FRANCIS LTD (Publisher)
Publication Details: INTEGRATED FERROELECTRICS, Vol.90, pp.42-52
Conference: 18th International Symposium on Integrated Ferroelectrics (Honolulu, HI, 23/04/2006 - 27/04/2006)
Date published: 01/01/2007
Date submitted: 17/05/2017
Identifiers: 99512440102346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Patterned high frequency thick film MEMS transducer

Abstract

Files and links (1)

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