Fabrication of PZT composite thick films for high frequency membrane resonators

FFC Duval; RA Dorey; RW Wright; Z Huang; RW Whatmore

doi:10.1007/s10832-004-5110-2

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Fabrication of PZT composite thick films for high frequency membrane resonators

Conference presentation

Peer reviewed

Fabrication of PZT composite thick films for high frequency membrane resonators

FFC Duval, RA Dorey, RW Wright, Z Huang and RW Whatmore

JOURNAL OF ELECTROCERAMICS, Vol.13(1-3), pp.267-270

International Conference on Electroceramics (ICE 2003) (MIT, Cambridge, MA, 03/08/2003–07/08/2003)

01/07/2004

DOI: https://doi.org/10.1007/s10832-004-5110-2

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

PZT

thick film

resonator

SILICON

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Title: Fabrication of PZT composite thick films for high frequency membrane resonators
Creators: FFC Duval
RA Dorey
RW Wright
Z Huang
RW Whatmore
Contributors: SPRINGER (Publisher)
Publication Details: JOURNAL OF ELECTROCERAMICS, Vol.13(1-3), pp.267-270
Conference: International Conference on Electroceramics (ICE 2003) (MIT, Cambridge, MA, 03/08/2003–07/08/2003)
Publication Date: 01/07/2004
Identifiers: 99512337402346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Fabrication of PZT composite thick films for high frequency membrane resonators

Abstract

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