Chemical vapor deposition of layered two-dimensional MoSi2N4 materials

Title: Chemical vapor deposition of layered two-dimensional MoSi2N4 materials
Creators: Yi Lun Hong
Zhibo Liu
Lei Wang
Tianya Zhou
Wei Ma
Chuan Xu
Shun Feng
Long Chen
Mao-Lin Chen
Dong-Ming Sun
Xing-Qiu Chen
Hui-ming Cheng
Wencai Ren
Publication Details: Science, Vol.369, 6504
Publisher: American Association for the Advancement of Science
Date submitted: 10/08/2020
Identifiers: 99512334902346
Copyright: Copyright © 2020, Copyright © 2020 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. https://www.sciencemag.org/about/science-licenses-journal-article-reuseThis is an article distributed under the terms of the Science Journals Default License.
Academic Unit: School of Computer Science and Electronic Engineering
Resource Type: Journal article

Abstract