- Title
- Influence of implantation conditions of He+ ions on the structure of a damaged layer in GaAs(001)
- Creators
- K ShcherbachevMJ Bailey
- Publication Details
- Physica Status Solidi (A) Applications and Materials, Vol.208(11), pp.2576-2581
- Publisher
- Wiley
- Date published
- 2011
- Date submitted
- 12/08/2013
- Identifiers
- 99512243302346
- Academic Unit
- Department of Chemistry
- Resource Type
- Journal article
Journal article
Influence of implantation conditions of He+ ions on the structure of a damaged layer in GaAs(001)
Physica Status Solidi (A) Applications and Materials, Vol.208(11), pp.2576-2581
2011
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