The feasibility of an XPS expert system demonstrated by a rule set for carbon contamination

JE Castle; MA Baker

doi:10.1016/S0368-2048(99)00065-1

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The feasibility of an XPS expert system demonstrated by a rule set for carbon contamination

Journal article

Peer reviewed

The feasibility of an XPS expert system demonstrated by a rule set for carbon contamination

JE Castle and MA Baker

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, Vol.105(2-3), pp.245-256

01/12/1999

DOI: https://doi.org/10.1016/S0368-2048(99)00065-1

Abstract

Science & Technology

Technology

Spectroscopy

SPECTROSCOPY

XPS

expert system

carbon contamination

surface analysis

data processing

ELECTRON-SPECTROSCOPY

ENERGY CALIBRATION

SPECTROMETERS

SPECTRA

XAES

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Title: The feasibility of an XPS expert system demonstrated by a rule set for carbon contamination
Creators: JE Castle
MA Baker
Publication Details: JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, Vol.105(2-3), pp.245-256
Publisher: ELSEVIER SCIENCE BV
Date published: 01/12/1999
Date submitted: 17/05/2017
Identifiers: 99512177102346
Academic Unit: University of Surrey; Department of Mechanical Engineering Sciences
Language: English
Resource Type: Journal article

The feasibility of an XPS expert system demonstrated by a rule set for carbon contamination

Abstract

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