The fabrication of aspherical microlenses using focused ion-beam techniques

MT Langridge; DC Cox; RP Webb; V Stolojan

doi:10.1016/j.micron.2013.10.013

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The fabrication of aspherical microlenses using focused ion-beam techniques

Journal article

Open access

Peer reviewed

The fabrication of aspherical microlenses using focused ion-beam techniques

MT Langridge, DC Cox, RP Webb and V Stolojan

MICRON, Vol.57, pp.56-66

01/02/2014

DOI: https://doi.org/10.1016/j.micron.2013.10.013

Abstract

Science & Technology

Technology

Microscopy

MICROSCOPY

Aspheric micro-lenses

Micro-fabrication

Focused ion beam lithography

Chemical etching

SILICON

BOMBARDMENT

DIFFUSION

GALLIUM

SENSORS

DAMAGE

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Title: The fabrication of aspherical microlenses using focused ion-beam techniques
Creators: MT Langridge
DC Cox
RP Webb
V Stolojan
Publication Details: MICRON, Vol.57, pp.56-66
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Date published: 01/02/2014
Date submitted: 16/12/2013
Identifiers: 99511954502346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

The fabrication of aspherical microlenses using focused ion-beam techniques

Abstract

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