- Title
- Ferroelectric thin and thick films for microsystems
- Creators
- RW WhatmoreQ ZhangZ HuangRA Dorey
- Contributors
- ELSEVIER SCI LTD (Publisher)
- Publication Details
- MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, Vol.5(2-3), pp.65-76
- Conference
- Symposium on Advanced Materials for Microelectronics held at the Spring Meeting of the E-MRS (STRASBOURG, FRANCE, 18/06/2002 - 21/06/2002)
- Date published
- 01/04/2002
- Date submitted
- 17/05/2017
- Identifiers
- 99511851502346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Ferroelectric thin and thick films for microsystems
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, Vol.5(2-3), pp.65-76
Symposium on Advanced Materials for Microelectronics held at the Spring Meeting of the E-MRS (STRASBOURG, FRANCE, 18/06/2002 - 21/06/2002)
01/04/2002
Metrics
74 Record Views