Novel patterning of composite thick film PZT

F Tyholdt; RA Dorey; H Raeder

doi:10.1007/s10832-007-9318-9

Back

Novel patterning of composite thick film PZT

Conference presentation

Peer reviewed

Novel patterning of composite thick film PZT

F Tyholdt, RA Dorey and H Raeder

JOURNAL OF ELECTROCERAMICS, Vol.19(4), pp.315-319

Piezoceramics for End Users II Conference (Hafjell, NORWAY, 05/03/2006 - 08/03/2006)

01/12/2007

DOI: https://doi.org/10.1007/s10832-007-9318-9

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

PZT

composite thick film

pattern

micro-mould

CHEMICAL-VAPOR-DEPOSITION

ELECTRICAL-PROPERTIES

FERROELECTRIC THIN

MICROSTRUCTURE

FABRICATION

SENSORS

INFILTRATIONS

RESONATORS

ACTUATORS

CERAMICS

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000251795200013&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

36 Record Views

Details

Title: Novel patterning of composite thick film PZT
Creators: F Tyholdt
RA Dorey
H Raeder
Contributors: SPRINGER (Publisher)
Publication Details: JOURNAL OF ELECTROCERAMICS, Vol.19(4), pp.315-319
Conference: Piezoceramics for End Users II Conference (Hafjell, NORWAY, 05/03/2006 - 08/03/2006)
Date published: 01/12/2007
Date submitted: 17/05/2017
Identifiers: 99511683502346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Novel patterning of composite thick film PZT

Abstract

Files and links (1)

Metrics

Details

Usage Policy