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Ion beam analysis of 6H SiC implanted with erbium and ytterbium ions
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Ion beam analysis of 6H SiC implanted with erbium and ytterbium ions

A Kozanecki, C Jeynes, BJ Sealy and A Nejim
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.136, pp.1272-1276
13th International Conference on Ion Beam Analysis (IBA-13) (LISBON, PORTUGAL, 27/07/1997 - 01/08/1997)
01/03/1998

Abstract

Science & Technology Technology Physical Sciences Instruments & Instrumentation Nuclear Science & Technology Physics Atomic Molecular & Chemical Physics Nuclear Physics INSTRUMENTS & INSTRUMENTATION NUCLEAR SCIENCE & TECHNOLOGY PHYSICS ATOMIC MOLECULAR & CHEMICAL PHYSICS NUCLEAR ion implantation SiC damage annealing recrystallization erbium ytterbium SILICON-CARBIDE
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