Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks

Wei Guan; Nianhua Peng; Christopher Jeynes; Jay Ghatak; Yong Peng; Ian M. Ross; Umananda M. Bhatta; Beverley J. Inkson; Günter Möbus

doi:10.1016/j.nimb.2013.02.046

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Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks

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Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks

Wei Guan, Nianhua Peng, Christopher Jeynes, Jay Ghatak, Yong Peng, Ian M. Ross, Umananda M. Bhatta, Beverley J. Inkson and Günter Möbus

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol.307, pp.273-276

15/07/2013

DOI: https://doi.org/10.1016/j.nimb.2013.02.046

Abstract

Ion beam synthesis

Nanoporous mask

Metal cluster

Lateral ordered Co, Pt and Co/Pt nanostructures were fabricated in SiO2 and Si3N4 substrates by high fluence metal ion implantation through periodic nanochannel membrane masks based on anodic aluminium oxides (AAO). The quality of nanopatterning transfer defined by various AAO masks in different substrates was examined by transmission electron microscopy (TEM) in both imaging and spectroscopy modes.

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Title: Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks
Creators: Wei Guan
Nianhua Peng
Christopher Jeynes
Jay Ghatak
Yong Peng
Ian M. Ross
Umananda M. Bhatta
Beverley J. Inkson
Günter Möbus
Publication Details: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol.307, pp.273-276
Publisher: Elsevier
Date published: 15/07/2013
Date accepted: 01/02/2013
Grants: EP/F062710/1, Engineering and Physical Sciences Research Council (United Kingdom, Swindon) - EPSRC
Grant note: This work was supported by EPSRC, grant number EP/F062710/1.
Identifiers: 99511384402346
Academic Unit: University of Surrey; School of Computer Science and Electronic Engineering
Resource Type: Journal article

Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks

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