- Title
- The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS
- Creators
- MA BakerJ Li
- Contributors
- JOHN WILEY & SONS LTD (null)
- Publication Details
- SURFACE AND INTERFACE ANALYSIS, Vol.38(4), pp.863-867
- Conference
- 11th European Conference on Applications of Surface and Interface Anlaysis (Vienna, AUSTRIA, 25/09/2005 - 30/09/2005)
- Date published
- 01/04/2006
- Date submitted
- 18/11/2011
- Identifiers
- 99511282802346
- Academic Unit
- Department of Mechanical Engineering Sciences
- Resource Type
- Conference presentation
Conference presentation
The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS
SURFACE AND INTERFACE ANALYSIS, Vol.38(4), pp.863-867
11th European Conference on Applications of Surface and Interface Anlaysis (Vienna, AUSTRIA, 25/09/2005 - 30/09/2005)
01/04/2006
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