Computer simulation of sputtering of gold targets using Sb and Sb(2) ions

R Webb; M Kerford; A Way

doi:10.1016/S0168-583X(99)00060-9

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Computer simulation of sputtering of gold targets using Sb and Sb(2) ions

Journal article

Peer reviewed

Computer simulation of sputtering of gold targets using Sb and Sb(2) ions

R Webb, M Kerford and A Way

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.153(1-4), pp.309-313

01/06/1999

DOI: https://doi.org/10.1016/S0168-583X(99)00060-9

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

BOMBARDMENT

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Title: Computer simulation of sputtering of gold targets using Sb and Sb(2) ions
Creators: R Webb
M Kerford
A Way
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.153(1-4), pp.309-313
Publisher: ELSEVIER SCIENCE BV
Date published: 01/06/1999
Date submitted: 17/05/2017
Identifiers: 99511267202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Computer simulation of sputtering of gold targets using Sb and Sb(2) ions

Abstract

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