Surface electrical conductivity of Co+-implanted a-SiC : H films

B Sealy; R Gwilliam; J Shannon; C Jeynes; C Angelov; T Tsvetkova

doi:10.1016/S0042-207X(98)00175-4

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Surface electrical conductivity of Co+-implanted a-SiC : H films

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Surface electrical conductivity of Co+-implanted a-SiC : H films

B Sealy, R Gwilliam, J Shannon, C Jeynes, C Angelov and T Tsvetkova

VACUUM, Vol.51(2), pp.281-284

10th International Summer School on Vacuum, Electron and Ion Technologies (VEIT 97) (VARNA, BULGARIA, 22/09/1997 - 27/09/1997)

01/10/1998

DOI: https://doi.org/10.1016/S0042-207X(98)00175-4

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Science & Technology

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Physical Sciences

Materials Science

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Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

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Title: Surface electrical conductivity of Co+-implanted a-SiC : H films
Creators: B Sealy
R Gwilliam
J Shannon
C Jeynes
C Angelov
T Tsvetkova
Contributors: PERGAMON-ELSEVIER SCIENCE LTD (Publisher)
Publication Details: VACUUM, Vol.51(2), pp.281-284
Conference: 10th International Summer School on Vacuum, Electron and Ion Technologies (VEIT 97) (VARNA, BULGARIA, 22/09/1997 - 27/09/1997)
Date published: 01/10/1998
Date submitted: 17/05/2017
Identifiers: 99511190602346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Surface electrical conductivity of Co+-implanted a-SiC : H films

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