Vacancy engineering - An ultra-low thermal budget method for high-concentration 'diffusionless' implantation doping

Journal article

Peer reviewed

NEB Cowern, AJ Smith, N Bennett, BJ Sealy, R Gwilliam, RP Webb, B Colombeau, S Paul, W Lerch and A Pakfar

Materials Science Forum, Vol.573-57, pp.295-304

2008

Abstract

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Title: Vacancy engineering - An ultra-low thermal budget method for high-concentration 'diffusionless' implantation doping
Creators: NEB Cowern
AJ Smith
N Bennett
BJ Sealy
R Gwilliam
RP Webb
B Colombeau
S Paul
W Lerch
A Pakfar
Publication Details: Materials Science Forum, Vol.573-57, pp.295-304
Date published: 2008
Date submitted: 17/05/2017
Identifiers: 99511190302346
Academic Unit: University of Surrey
Resource Type: Journal article