LOW-ENERGY (2-5 KEV) ARGON DAMAGE IN SILICON

U BANGERT; PJ GOODHEW; C JEYNES; IH WILSON

doi:10.1088/0022-3727/19/4/013

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Journal article

LOW-ENERGY (2-5 KEV) ARGON DAMAGE IN SILICON

U BANGERT, PJ GOODHEW, C JEYNES and IH WILSON

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.19(4), pp.589-603

01/04/1986

DOI: https://doi.org/10.1088/0022-3727/19/4/013

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Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

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Title: LOW-ENERGY (2-5 KEV) ARGON DAMAGE IN SILICON
Creators: U BANGERT
PJ GOODHEW
C JEYNES
IH WILSON
Publication Details: JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.19(4), pp.589-603
Publisher: IOP PUBLISHING LTD
Date published: 01/04/1986
Date submitted: 17/05/2017
Identifiers: 99511105902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

LOW-ENERGY (2-5 KEV) ARGON DAMAGE IN SILICON

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