Combined x-ray photoelectron Auger electron spectroscopy glancing angle x-ray diffraction extended x-ray absorption fine structure investigation of TiBxNy coatings

MA Baker; TP Mollart; PN Gibson; W Gissler

doi:10.1116/1.580526

$Combined x-ray photoelectron Auger electron spectroscopy glancing angle x-ray diffraction extended x-ray absorption fine structure investigation of TiBxNy coatings$

Journal article

Peer reviewed

Combined x-ray photoelectron Auger electron spectroscopy glancing angle x-ray diffraction extended x-ray absorption fine structure investigation of TiBxNy coatings

MA Baker, TP Mollart, PN Gibson and W Gissler

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.15(2), pp.284-291

01/03/1997

DOI: https://doi.org/10.1116/1.580526

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Coatings & Films

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

BORON-NITRIDE

THIN-FILMS

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Title: Combined x-ray photoelectron Auger electron spectroscopy glancing angle x-ray diffraction extended x-ray absorption fine structure investigation of TiBxNy coatings
Creators: MA Baker
TP Mollart
PN Gibson
W Gissler
Publication Details: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.15(2), pp.284-291
Publisher: AMER INST PHYSICS
Date published: 01/03/1997
Date submitted: 17/05/2017
Identifiers: 99511074702346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Combined x-ray photoelectron Auger electron spectroscopy glancing angle x-ray diffraction extended x-ray absorption fine structure investigation of TiBxNy coatings

Abstract

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