Study of the chemical composition and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

MA Baker; P Hammer

doi:10.1002/(SICI)1096-9918(199705)25:5<301::AID-SIA236>3.3.CO;2-1

Back

Study of the chemical composition and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

Journal article

Peer reviewed

Study of the chemical composition and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

MA Baker and P Hammer

SURFACE AND INTERFACE ANALYSIS, Vol.25(5), pp.301-314

01/05/1997

DOI: https://doi.org/10.1002/(SICI)1096-9918(199705)25:5<301::AID-SIA236>3.3.CO;2-1

Abstract

Science & Technology

Physical Sciences

Chemistry

Physical

Chemistry

CHEMISTRY

PHYSICAL

XPS

FTIR

carbon nitride

thin film

simulation

NITRIDE THIN-FILMS

AMORPHOUS-CARBON

SPECTROSCOPY

GRAPHITE

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1997XC50700001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

33 Record Views

41 Times Cited - Web of Science

Details

Title: Study of the chemical composition and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation
Creators: MA Baker
P Hammer
Publication Details: SURFACE AND INTERFACE ANALYSIS, Vol.25(5), pp.301-314
Publisher: JOHN WILEY & SONS LTD
Date published: 01/05/1997
Date submitted: 17/05/2017
Identifiers: 99511039602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Study of the chemical composition and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

Abstract

Files and links (1)

Metrics

Details

Usage Policy