DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS

T BACHMANN; E WENDLER; W WESCH; O HERRE; RJ WILSON; C JEYNES; RM GWILLIAM; BJ SEALY

doi:10.1016/0168-583X(94)00565-6

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DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS

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DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS

T BACHMANN, E WENDLER, W WESCH, O HERRE, RJ WILSON, C JEYNES, RM GWILLIAM and BJ SEALY

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.99(1-4), pp.619-622

13th International Conference on the Application of Accelerators in Research and Industry (DENTON, TX, 07/11/1994 - 10/11/1994)

01/05/1995

DOI: https://doi.org/10.1016/0168-583X(94)00565-6

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

SEMICONDUCTORS

AMORPHIZATION

CRYSTALLINE

SILICON

MODEL

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Title: DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS
Creators: T BACHMANN
E WENDLER
W WESCH
O HERRE
RJ WILSON
C JEYNES
RM GWILLIAM
BJ SEALY
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.99(1-4), pp.619-622
Conference: 13th International Conference on the Application of Accelerators in Research and Industry (DENTON, TX, 07/11/1994 - 10/11/1994)
Date published: 01/05/1995
Date submitted: 17/05/2017
Identifiers: 99510985702346
Academic Unit: University of Surrey
Resource Type: Conference presentation

DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS

Abstract

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