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Two-Hundred-Nanometer Bottom-Gate/Top-Contact Vertical-Channel IGZO TFTs With a Non-Lithographically Defined Channel Length
Journal article   Open access   Peer reviewed

Two-Hundred-Nanometer Bottom-Gate/Top-Contact Vertical-Channel IGZO TFTs With a Non-Lithographically Defined Channel Length

Zicong Huang, Eva Bestelink, Radu Sporea and Ioannis Kymissis
Journal of the Society for Information Display
26/08/2026

Abstract

backplane metal oxide semiconductor self-aligned process thin film transistors vertical-channel transistors

We report a bottom-gate, top-contact vertical-channel In-Ga-Zn-O (IGZO) thin-film transistor (TFT) with a 200-nm channel length defined by vertical stack thickness rather than lithographic critical-dimension control. Conformally RF-sputtered IGZO, together with intentionally nonconformal thermally evaporated Al contacts, enables a self-aligned source/drain formation, whereas a SiO spacer shrinks the gate-drain overlap capacitance by 98% without introducing ungated regions. The resulting devices achieve an on/off current ratio of , a subthreshold swing as low as 118 mV/dec, and a drive current up to 5.34 A/m at = 2 V and = 4 V, matching or surpassing state-of-the-art top-gate vertical IGZO TFTs. Two-dimensional TCAD simulations corroborate the measured electrostatics, clarify charge-control mechanisms in the ultrashort vertical channel, and indicate pathways-such as contact engineering and a thinner IGZO layer-to further enhance on-current flow and saturation. These results indicate that the proposed architecture is a promising candidate for compact active-matrix drivers in next-generation micro-OLED and micro-LED displays.

url
https://doi.org/10.1002/jsid.70100View
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