Abstract
Disclosed are a three-dimensional diffraction optical microscopy of a common optical path which can both measure three-dimensional refractivity distribution, and the film vibration of a sample. The three-dimensional diffraction optical microscopy of a common optical path comprises: a light source (101) for radiating a beam; a lens unit for changing an incident angle incident in the sample of the beam, and compensating an optical axis changed by changing the incident angle; a camera unit for measuring an interference fringe between beams transmitted the sample; and an analyzing unit for calculating three-dimensional refractivity distribution of the sample based on an interference pattern between the beams, and analyzing the film vibration of the sample.COPYRIGHT KIPO 2016