X-ray photoelectron study of high-energy He+ implanted a-SiC:H thin films

Journal article

Peer reviewed

T Tsvetkova, P Sellin, D Dimova-Malinovska, O Angelov, V Krastev, P Stefanov and I Avramova

Journal of Physics: Conference Series, Vol.253(1)

2010

Abstract

17 Record Views

Title: X-ray photoelectron study of high-energy He+ implanted a-SiC:H thin films
Creators: T Tsvetkova
P Sellin
D Dimova-Malinovska
O Angelov
V Krastev
P Stefanov
I Avramova
Publication Details: Journal of Physics: Conference Series, Vol.253(1)
Date published: 2010
Date submitted: 03/01/2012
Identifiers: 99515953302346
Academic Unit: University of Surrey
Resource Type: Journal article