Transition from amorphous to crystalline beta phase in co-sputtered FeSi2 films as a function of temperature

M Milosavljevic; G Shao; MA Lourenco; RM Gwilliam; KP Homewood; SP Edwards; R Valizadeh; JS Colligon

doi:10.1063/1.2148629

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Transition from amorphous to crystalline beta phase in co-sputtered FeSi2 films as a function of temperature

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Transition from amorphous to crystalline beta phase in co-sputtered FeSi2 films as a function of temperature

M Milosavljevic, G Shao, MA Lourenco, RM Gwilliam, KP Homewood, SP Edwards, R Valizadeh and JS Colligon

JOURNAL OF APPLIED PHYSICS, Vol.98(12), pp.?-?

15/12/2005

DOI: https://doi.org/10.1063/1.2148629

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

DISILICIDE THIN-FILMS

IRON DISILICIDE

OPTICAL-PROPERTIES

BETA-FESI2

DEPOSITION

POLYCRYSTALLINE

SILICON

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Title: Transition from amorphous to crystalline beta phase in co-sputtered FeSi2 films as a function of temperature
Creators: M Milosavljevic
G Shao
MA Lourenco
RM Gwilliam
KP Homewood
SP Edwards
R Valizadeh
JS Colligon
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.98(12), pp.?-?
Publisher: AMER INST PHYSICS
Date published: 15/12/2005
Date submitted: 27/05/2010
Identifiers: 99511802802346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

Transition from amorphous to crystalline beta phase in co-sputtered FeSi2 films as a function of temperature

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