Thickness dependence of properties of excimer laser crystallized nano-polycrystalline silicon

AADT Adikaari; SRP Silva

doi:10.1063/1.1898444

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Thickness dependence of properties of excimer laser crystallized nano-polycrystalline silicon

Journal article

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Peer reviewed

Thickness dependence of properties of excimer laser crystallized nano-polycrystalline silicon

AADT Adikaari and SRP Silva

JOURNAL OF APPLIED PHYSICS, Vol.97(11), pp.?-?

01/06/2005

DOI: https://doi.org/10.1063/1.1898444

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

THIN-FILM TRANSISTORS

HYDROGENATED AMORPHOUS-SILICON

CHEMICAL-VAPOR-DEPOSITION

SUPER-LATERAL GROWTH

A-SI-H

MICROCRYSTALLINE SILICON

SOLAR-CELLS

RAMAN-SPECTROSCOPY

VOLUME FRACTION

LOW-TEMPERATURE

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Title: Thickness dependence of properties of excimer laser crystallized nano-polycrystalline silicon
Creators: AADT Adikaari
SRP Silva
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.97(11), pp.?-?
Publisher: AMER INST PHYSICS
Date published: 01/06/2005
Date submitted: 27/05/2010
Identifiers: 99514949002346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

Thickness dependence of properties of excimer laser crystallized nano-polycrystalline silicon

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