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The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography
Journal article   Open access  Peer reviewed

The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography

CA Mills, JG Fernandez, A Errachid and J Samitier
MICROELECTRONIC ENGINEERING, Vol.85(9), pp.1897-1901
01/09/2008
DOI: https://doi.org/10.1016/j.mee.2008.06.014

Abstract

Science & Technology Technology Physical Sciences Engineering Electrical & Electronic Nanoscience & Nanotechnology Optics Physics Applied Engineering Science & Technology - Other Topics Physics ENGINEERING ELECTRICAL & ELECTRONIC NANOSCIENCE & NANOTECHNOLOGY OPTICS PHYSICS APPLIED polymer engineering embossing nanoimprint lithography BIOMEDICAL APPLICATIONS
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http://dx.doi.org/10.1016/j.mee.2008.06.014View
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