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The lifetime distribution of excess carriers in H+ ion implanted silicon by photoconductive frequency resolved spectroscopy
Journal article   Open access

The lifetime distribution of excess carriers in H+ ion implanted silicon by photoconductive frequency resolved spectroscopy

MA Niby, DQ Li, MA Lourenco, A Nejim, KP Homewood, PLF Hemment, E Ishidida, M Current, S Banerjee, L Larson, …
ION IMPLANTATION TECHNOLOGY - 96, pp.668-671
11th International Conference on Ion Implantation Technology (AUSTIN, TX, 16/06/1996–21/06/1996)
01/01/1997

Abstract

Science & Technology Technology Engineering Electrical & Electronic Materials Science Multidisciplinary Engineering Materials Science
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