The effects of implanted arsenic on Ti-silicide formation

M Milosavljevic; N Bibic; D Perusko; C Jeynes; U Bangert

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Journal article

The effects of implanted arsenic on Ti-silicide formation

M Milosavljevic, N Bibic, D Perusko, C Jeynes and U Bangert

SOLID STATE PHENOMENA, Vol.71, pp.147-171

01/01/2000

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

titanium silicides

silicidation

annealing

phase formation

interface

reaction kinetics

silicon

arsenic ion implantation

ion beam mixing

RBS analysis

electron microscopy

TITANIUM DISILICIDE FORMATION

X-RAY-DIFFRACTION

PHASE-TRANSFORMATION

THIN-FILMS

C49 TISI2

INTERFACIAL REACTIONS

METAL-METAL

SI

MULTILAYERS

STABILITY

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Title: The effects of implanted arsenic on Ti-silicide formation
Creators: M Milosavljevic
N Bibic
D Perusko
C Jeynes
U Bangert
Publication Details: SOLID STATE PHENOMENA, Vol.71, pp.147-171
Publisher: TRANS TECH-SCITEC PUBLICATIONS LTD
Date published: 01/01/2000
Date submitted: 17/05/2017
Identifiers: 99513241902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

The effects of implanted arsenic on Ti-silicide formation

Abstract

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