TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

SRP SILVA; A KAPOOR; GAJ AMARATUNGA

doi:10.1016/0257-8972(94)02377-8

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TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

Journal article

Peer reviewed

TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

SRP SILVA, A KAPOOR and GAJ AMARATUNGA

SURFACE & COATINGS TECHNOLOGY, Vol.73(1-2), pp.132-136

01/07/1995

DOI: https://doi.org/10.1016/0257-8972(94)02377-8

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Coatings & Films

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

DIAMOND-LIKE CARBON

WEAR

AMORPHOUS CARBON

CHEMICAL VAPOR DEPOSITION

AMORPHOUS-CARBON

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Title: TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD
Creators: SRP SILVA
A KAPOOR
GAJ AMARATUNGA
Publication Details: SURFACE & COATINGS TECHNOLOGY, Vol.73(1-2), pp.132-136
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Date published: 01/07/1995
Date submitted: 17/05/2017
Identifiers: 99511369302346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

Abstract

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