Synthesis of carbon nitride films at low temperature

P Hammer; MA Baker; C Lenardi; W Gissler

doi:10.1116/1.580481

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Synthesis of carbon nitride films at low temperature

Journal article

Peer reviewed

Synthesis of carbon nitride films at low temperature

P Hammer, MA Baker, C Lenardi and W Gissler

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.15(1), pp.107-112

01/01/1997

DOI: https://doi.org/10.1116/1.580481

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Coatings & Films

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

ION-BEAM DEPOSITION

THIN-FILMS

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Title: Synthesis of carbon nitride films at low temperature
Creators: P Hammer
MA Baker
C Lenardi
W Gissler
Publication Details: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.15(1), pp.107-112
Publisher: AMER INST PHYSICS
Date published: 01/01/1997
Date submitted: 17/05/2017
Identifiers: 99510964202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Synthesis of carbon nitride films at low temperature

Abstract

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