Surface induced bulk modifications of amorphous carbon nitride films by post-deposition oxygen and hydrogen plasma treatment

Y Miyajima; S Nitta; SRP Silva; DA Zeze

doi:10.1016/j.tsf.2005.06.033

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Surface induced bulk modifications of amorphous carbon nitride films by post-deposition oxygen and hydrogen plasma treatment

Journal article

Peer reviewed

Surface induced bulk modifications of amorphous carbon nitride films by post-deposition oxygen and hydrogen plasma treatment

Y Miyajima, S Nitta, SRP Silva and DA Zeze

THIN SOLID FILMS, Vol.491(1-2), pp.161-167

22/11/2005

DOI: https://doi.org/10.1016/j.tsf.2005.06.033

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

amorphous carbon nitride

X-ray photoelectron spectroscopy

optical properties

sputtering

THIN-FILMS

DEPOSITION

XPS

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Title: Surface induced bulk modifications of amorphous carbon nitride films by post-deposition oxygen and hydrogen plasma treatment
Creators: Y Miyajima
S Nitta
SRP Silva
DA Zeze
Publication Details: THIN SOLID FILMS, Vol.491(1-2), pp.161-167
Publisher: ELSEVIER SCIENCE SA
Date published: 22/11/2005
Date submitted: 17/05/2017
Identifiers: 99515468002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Surface induced bulk modifications of amorphous carbon nitride films by post-deposition oxygen and hydrogen plasma treatment

Abstract

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