Stress-induced formation of high-density amorphous carbon thin films

J Schwan; S Ulrich; T Theel; H Roth; H Ehrhardt; P Becker; SRP Silva

doi:10.1063/1.366469

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Stress-induced formation of high-density amorphous carbon thin films

Journal article

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Peer reviewed

Stress-induced formation of high-density amorphous carbon thin films

J Schwan, S Ulrich, T Theel, H Roth, H Ehrhardt, P Becker and SRP Silva

JOURNAL OF APPLIED PHYSICS, Vol.82(12), pp.6024-6030

15/12/1997

DOI: https://doi.org/10.1063/1.366469

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

DIAMOND-LIKE CARBON

NANOCRYSTALLINE C-BN

ION-BEAM DEPOSITION

X-RAY-DIFFRACTION

COMPRESSIVE-STRESS

HIGH-PRESSURE

GRAPHITE

MODEL

TRANSFORMATION

SPECTROSCOPY

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Title: Stress-induced formation of high-density amorphous carbon thin films
Creators: J Schwan
S Ulrich
T Theel
H Roth
H Ehrhardt
P Becker
SRP Silva
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.82(12), pp.6024-6030
Publisher: AMER INST PHYSICS
Date published: 15/12/1997
Date submitted: 08/10/2010
Identifiers: 99511813602346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

Stress-induced formation of high-density amorphous carbon thin films

Abstract

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