Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures

FFC Duval; RA Dorey; RH Haigh; RW Whatmore

doi:10.1016/S0040-6090(03)01129-5

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Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures

Journal article

Peer reviewed

Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures

FFC Duval, RA Dorey, RH Haigh and RW Whatmore

THIN SOLID FILMS, Vol.444(1-2), pp.235-240

01/11/2003

DOI: https://doi.org/10.1016/S0040-6090(03)01129-5

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

PZT

platinum

silicon

interface

BARRIER

LAYERS

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Title: Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures
Creators: FFC Duval
RA Dorey
RH Haigh
RW Whatmore
Publication Details: THIN SOLID FILMS, Vol.444(1-2), pp.235-240
Publisher: ELSEVIER SCIENCE SA
Date published: 01/11/2003
Date submitted: 17/05/2017
Identifiers: 99516205402346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures

Abstract

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