Size limit on the phosphorous doped silicon nanocrystals for dopant activation

P Yang; RM Gwilliam; IF Crowell; N Papachristodoulou; MP Halsall; NP Hylton; O Hulko; AP Knights; M Shah; AJ Kenyon

doi:10.1016/j.nimb.2012.12.077

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Size limit on the phosphorous doped silicon nanocrystals for dopant activation

Journal article

Peer reviewed

Size limit on the phosphorous doped silicon nanocrystals for dopant activation

P Yang, RM Gwilliam, IF Crowell, N Papachristodoulou, MP Halsall, NP Hylton, O Hulko, AP Knights, M Shah and AJ Kenyon

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.307, pp.456-458

15/07/2013

DOI: https://doi.org/10.1016/j.nimb.2012.12.077

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

Silicon nanocrystals

Phosphorus

Ion implantation

PASSIVATION

EMISSION

SIO2

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Title: Size limit on the phosphorous doped silicon nanocrystals for dopant activation
Creators: P Yang
RM Gwilliam
IF Crowell
N Papachristodoulou
MP Halsall
NP Hylton
O Hulko
AP Knights
M Shah
AJ Kenyon
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.307, pp.456-458
Publisher: ELSEVIER SCIENCE BV
Date published: 15/07/2013
Date submitted: 17/05/2017
Identifiers: 99515523602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Size limit on the phosphorous doped silicon nanocrystals for dopant activation

Abstract

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