Shallow junctions in silicon via low thermal budget processing

Journal article

BJ Sealy, AJ Smith, T Alzanki, N Bennett, L Li, C Jeynes, B Colombeau, EJH Collart, NG Emerson, RM Gwilliam, …

Extended Abstracts of the Sixth International Workshop on Junction Technology, IWJT '06, pp.10-15

2006

Abstract

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Title: Shallow junctions in silicon via low thermal budget processing
Creators: BJ Sealy
AJ Smith
T Alzanki
N Bennett
L Li
C Jeynes
B Colombeau
EJH Collart
NG Emerson
RM Gwilliam
NEB Cowern
Publication Details: Extended Abstracts of the Sixth International Workshop on Junction Technology, IWJT '06, pp.10-15
Date published: 2006
Date submitted: 17/05/2017
Identifiers: 99513342102346
Academic Unit: University of Surrey
Resource Type: Journal article