SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING

GT REED; JH LI; CK TANG; CL LIN; PLF HEMMENT; AG RICKMAN

doi:10.1016/0921-5107(92)90048-E

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SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING

Journal article

Peer reviewed

SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING

GT REED, JH LI, CK TANG, CL LIN, PLF HEMMENT and AG RICKMAN

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol.15(2), pp.156-159

01/11/1992

DOI: https://doi.org/10.1016/0921-5107(92)90048-E

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Condensed Matter

Materials Science

Physics

WAVE-GUIDES

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Title: SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING
Creators: GT REED
JH LI
CK TANG
CL LIN
PLF HEMMENT
AG RICKMAN
Publication Details: MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol.15(2), pp.156-159
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Date published: 01/11/1992
Date submitted: 17/05/2017
Identifiers: 99513195202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING

Abstract

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